Oxide TFTs: A Progress Report
John F. Wager
School of EECS, Oregon State University, Corvallis, Oregon, 97331-5501 U.S.A.
Phone: 541-737-2994, E-mail:
For flat-panel-display backplane applications, oxide-TFT technology is the new kid on the block
– recently conceived and in its early stages of commercialization. How is it going for oxide-TFT
technology as it attempts to match up with amorphous hydrogenated silicon (a-Si:H) and low-
temperature polysilicon (LTPS) technology
?
PO 4
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